Systems and methods of hysteresis compensation

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12183537
APP PUB NO 20230101676A1
SERIAL NO

18059585

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Abstract

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A positioning system can include a drive unit having an actuator element and a control system. The actuator element can include a piezoelectric material. The control system can be configured to select a path between a first position and a second position, identify at least one change of direction of the actuator element along the selected path, generate a hysteresis-compensated drive signal based at least in part on the change in direction, and apply the hysteresis-compensated drive signal to the actuator element to move an object along the path.

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Patent Owner(s)

Patent OwnerAddress
FEI COMPANY5350 NE DAWSON CREEK DRIVE HILLSBORO OR 97124

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Tacx, Paul Roermond, NL 5 1
Verschueren, Edwin Mierlo, NL 10 4

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