Nanostructures for optical devices
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United States of America
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Dec 31, 2024
Grant Date -
Feb 23, 2023
app pub date -
Oct 31, 2022
filing date -
Oct 31, 2022
priority date (Note) -
In Force
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Abstract
Embodiments of metasurfaces having nanostructures with desired geometric profiles and configurations are provided in the present disclosure. In one embodiment, a metasurface includes a nanostructure formed on a substrate, wherein the nanostructure is cuboidal or cylindrical in shape. In another embodiment, a metasurface includes a plurality of nanostructures on a substrate, wherein each of the nanostructures has a gap greater than 35 nm spaced apart from each other. In yet another embodiment, a metasurface includes a plurality of nanostructures on a substrate, wherein the nanostructures are fabricated from at least one of TiO2, silicon nitride, or amorphous silicon, or GaN or aluminum zinc oxide or any material with refractive index greater than 1.8, and absorption coefficient smaller than 0.001, the substrate is transparent with absorption coefficient smaller than 0.001.

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Patent Owner(s)
Patent Owner | Address | |
---|---|---|
APPLIED MATERIALS INC | 3050 BOWERS AVENUE SANTA CLARA CA 95054 |
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Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
McMillan, Wayne | San Jose, US | 33 | 230 |
Meyer, Timmerman Thijssen Rutger | Sunnyvale, US | 90 | 181 |
Roy, Tapashree | Bangalore, IN | 19 | 63 |
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