Loading device, arrangement and method for loading a reaction chamber

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12180588
APP PUB NO 20240026536A1
SERIAL NO

18475316

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Importance

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Abstract

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A loading device, arrangement, and method for loading a reaction chamber inside a vacuum chamber. The loading device includes a loading platform arranged to support the reaction chamber, the loading platform having a first end, a second end and a first direction, a first loading member provided to the loading platform, and a second loading member provided to the loading platform, the first loading member being arranged independently movable in relation to the loading platform and the second loading member in the first direction, and the second loading member being arranged independently movable in relation to the loading platform and the first loading member in the first direction.

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Patent Owner(s)

Patent OwnerAddress
BENEQ OYOLARINLUOMA 9 ESPOO 02200

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Andersson, Jonas Espoo, FI 65 1485
Soininen, Pekka Espoo, FI 69 3092
Wesslin, Johannes Espoo, FI 7 0

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