Vacuum chamber and arrangement for atomic layer deposition

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12180587
APP PUB NO 20240026535A1
SERIAL NO

18475300

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Abstract

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A vacuum chamber and an arrangement for atomic layer deposition. The vacuum chamber includes a loading wall provided with a loading opening, a back wall opposite the loading wall, and a first direction extending in a direction between the loading wall and the back wall. The vacuum chamber further includes a first vacuum chamber support rail inside the vacuum chamber and extending in the first direction, and a second vacuum chamber support rail inside the vacuum chamber and extending in the first direction and arranged spaced apart from the first vacuum chamber support rail. The first vacuum chamber support rail is arranged independently movable in vertical direction, and the second vacuum chamber support rail is arranged independently movable in vertical direction.

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Patent Owner(s)

Patent OwnerAddress
BENEQ OYOLARINLUOMA 9 ESPOO 02200

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Andersson, Jonas Espoo, FI 65 1485
Soininen, Pekka Espoo, FI 69 3092
Wesslin, Johannes Espoo, FI 7 0

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