RF voltage and current (V-I) sensors and measurement methods

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12176183
APP PUB NO 20240038496A1
SERIAL NO

18486220

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A radio frequency sensor assembly includes a sensor casing disposed around a central hole, the sensor casing including a first conductive cover and a second conductive cover. The assembly includes a cavity disposed around the central hole and includes a dielectric material, the cavity being bounded by a first major outer surface and a second major outer surface along a radial direction from a center of the central hole, where the first conductive cover is electrically coupled to the second conductive cover through a coupling region beyond the second major outer surface of the cavity, and electrically insulated from the second conductive cover by the cavity and the central hole. The assembly includes a current sensor electrically insulated from the sensor casing and including a current pickup disposed symmetrically around the central hole, the current pickup being disposed within the cavity and being insulated from the sensor casing.

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Patent Owner(s)

Patent OwnerAddress
TOKYO ELECTRON LIMITED3-1 AKASAKA 5-CHOME MINATO-KU TOKYO 107-6325

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
DuBose, Chelsea Austin, US 15 28
Funk, Merritt Austin, US 122 2737
Hummel, Michael Austin, US 34 151
Lane, Barton Austin, US 45 195
Moses, Justin Austin, US 14 23
Yamazawa, Yohei Tokyo, JP 101 1955

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