Storage environment monitoring system and methods of operation

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12174528
APP PUB NO 20220308442A1
SERIAL NO

17214367

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Abstract

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A storage environment monitoring device is capable of measuring and/or monitoring various parameters of an environment inside a storage area, such as airflow, temperature, and humidity, to increase the storage quality of semiconductor components stored in the storage area. The storage environment monitoring device is capable of measuring and/or monitoring the parameters of the environment inside the storage area without having to open an enclosure that is storing the semiconductor components in the storage area. This reduces exposure of the semiconductor components to contamination and other environmental factors. In addition, the storage environment monitoring device may perform automatic measurements inside the storage area based on usage schedules of the semiconductor components that are to be stored in the storage area, which decreases downtime of the storage area and/or the semiconductor components, and increases productivity in a semiconductor processing environment in which the semiconductor components are used.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTDHSINCHU

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Chun-Hau Hsinchu, TW 2 0
Lai, Kuan Yu Hsinchu, TW 3 1
Li, Fu-Hsien Hsinchu, TW 36 25
Lin, Chuan Wei Hsinchu, TW 7 2
Lu, Chen-Wei Hsinchu, TW 45 278
Shen, Hsiang Yin Hsinchu, TW 39 32
Tung, Chi-Feng Hsinchu, TW 48 53

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