Heater substrate, probe card substrate, and probe card
Number of patents in Portfolio can not be more than 2000
United States of America
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Dec 24, 2024
Grant Date -
Mar 16, 2023
app pub date -
Jan 22, 2021
filing date -
Jan 22, 2021
priority date (Note) -
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status (Latency Note)
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Abstract
Provided is a heater substrate that includes an insulating substrate having a first surface and a second surface that is on an opposite side from the first surface, a heater wire located inside the insulating substrate, and an adjustment part that is electrically connected to the heater wire. The adjustment part includes a pair of adjustment terminals that are located on the second surface and are respectively electrically connected to two ends of a partial section of the heater wire, and an adjustment conductor that is located on the second surface and is connected to the pair of adjustment terminals. Also provided are a probe card substrate and a probe card that include the heater substrate.
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