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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
L'AIR LIQUIDE SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE	PARIS

International Classification(s)

• C23C:COATING METALLIC MATERIAL; COATING MATERIAL WITH M....
• C07F:ACYCLIC, CARBOCYCLIC, OR HETEROCYCLIC COMPOUNDS CO....

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• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Arteaga, Muller Rocio Alejandra	Yokosuka, JP	6	0
Blasco, Nicolas	Grenoble, FR	43	1053
Girard, Jean-Marc	Versailles, FR	121	3273
Lansalot-Matras, Clément	Plélo, FR	43	2138
Lee, Jooho	Seoul, KR	95	208
Marques-Gonzalez, Santiago	Tsukuba, JP	2	8
Rochat, Raphael	Yokohama, JP	6	8
Sanchez, Antonio	Tsukuba, JP	46	1862
Wan, Zhiwen	Plano, US	19	47

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date
3.5 Year Payment	$1600.00	$800.00	$400.00	Jun 24, 2028
7.5 Year Payment	$3600.00	$1800.00	$900.00	Jun 24, 2032
11.5 Year Payment	$7400.00	$3700.00	$1850.00	Jun 24, 2036

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge - 3.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge - 7.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge - 11.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent Application No: 12173403

Group 6 transition metal-containing compositions for vapor deposition of group 6 transition metal-containing films

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