Micro-electro-mechanical system (MEMS) vibration sensor and fabricating method thereof

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12172886
APP PUB NO 20220371881A1
SERIAL NO

17747856

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Abstract

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A MEM vibration sensor includes a substrate including a first supporting-portion and a cavity and a sensing-device disposed on the substrate. The sensing-device includes a second supporting-portion correspondingly disposed over and connected with the first supporting-portion, a first sensing-unit disposed on the cavity, a first mass-block disposed on the cavity, a second sensing-unit disposed on the first sensing-unit and the first mass-block, a first metal pad disposed on the third supporting-portion and electrically coupled with the first sensing-unit, and a second metal pad disposed on the third supporting-portion and electrically coupled with the second sensing-unit.

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Patent Owner(s)

Patent OwnerAddress
UPBEAT TECHNOLOGY CO LTD11F NO 221 SEC 3 BEIXIN RD XINDIAN DIST NEW TAIPEI CITY 23143

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ho, Hsien-Lung New Taipei, TW 23 161
Tung, Hsi-Wen New Taipei, TW 10 35

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