Method for producing fine structures in the volume of a substrate composed of hard brittle material

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12172157
APP PUB NO 20220401953A1
SERIAL NO

17893860

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Abstract

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A method for producing a cavity in a substrate composed of hard brittle material is provided. A laser beam of an ultrashort pulse laser is directed a side surface of the substrate and is concentrated by a focusing optical unit to form an elongated focus in the substrate. Incident energy of the laser beam produces a filament-shaped flaw in a volume of the substrate. The filament-shaped flaw extends into the volume to a predetermined depth and does not pass through the substrate. To produce the filament-shaped flaw, the ultrashort pulse laser radiates in a pulse or a pulse packet having at least two successive laser pulses. After at least two filament-shaped flaws are introduced, the substrate is exposed to an etching medium which removes material of the substrate and widens the at least two filament-shaped flaws to form filaments. At least two filaments are connected to form a cavity.

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Patent Owner(s)

Patent OwnerAddress
SCHOTT AGGERMANY MAINZ MAINZ RHINELAND-PALATINATE

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Brueckbauer, Laura Dorn-Duerkheim, DE 5 1
Esemann, Hauke Woerrstadt, DE 35 278
Heiss-Chouquet, Markus Bischofsheim, DE 28 65
Hiller, Vanessa Mainz, DE 9 22
Mangold, Stephanie Klein-Winternheim, DE 30 13
Ortner, Andreas Gau-Algesheim, DE 63 253
Roters, Andreas Mainz, DE 41 199
Wagner, Fabian Mainz, DE 93 456

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