Robot for simultaneous substrate transfer

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12170220
APP PUB NO 20230005783A1
SERIAL NO

17940369

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Exemplary substrate processing systems may include a transfer region housing defining a transfer region fluidly coupled with a plurality of processing regions. A sidewall of the transfer region housing may define a sealable access for providing and receiving substrates. The systems may include a plurality of substrate supports disposed within the transfer region. The systems may also include a transfer apparatus having a central hub including a first shaft and a second shaft counter-rotatable with the first shaft. The transfer apparatus may include an eccentric hub extending at least partially through the central hub, and which is radially offset from a central axis of the central hub. The transfer apparatus may also include an end effector coupled with the eccentric hub. The end effector may include a plurality of arms having a number of arms equal to the number of substrate supports of the plurality of substrate supports.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bonecutter, Luke Cedar Park, US 17 158
Carlson, Charles T Austin, US 58 264
Hudgens, Jeff San Francisco, US 14 173
Muthukamatchi, Karuppasamy Bangalore, IN 17 71
Riordon, Benjamin Newburyport, US 18 67
Schaller, Jason M Austin, US 61 1464
Thanu, Rajkumar Santa Clara, US 21 40

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