Gimbal bonding tool and a method to correct surface non-uniformities using a bonding tool

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United States of America

PATENT NO 12170212
APP PUB NO 20240162062A1
SERIAL NO

18550805

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Abstract

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The present invention discloses a method and apparatus to correct surface non-uniformities between a donor substrate and a system substrate using a bonding tool. The bonding tool has multiple segments with internal structure to facilitate the objective. In particular, arc shaped guideways and resulting movements exemplify the method.

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Patent Owner(s)

Patent OwnerAddress
VUEREAL INCONTARIO ONTARIO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gingras, Drew Robert Waterloo, CA 2 0

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