Wafer support table and RF rod
Number of patents in Portfolio can not be more than 2000
United States of America
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-
Dec 17, 2024
Grant Date -
Feb 23, 2023
app pub date -
Oct 19, 2022
filing date -
Oct 19, 2022
priority date (Note) -
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status (Latency Note)
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Abstract
A wafer support table includes a ceramic base having a wafer placement surface and including an RF electrode and a heater electrode embedded, the RF electrode being closer to the wafer placement surface; a hole extending from a surface of the ceramic base opposite the wafer placement surface toward the RF electrode; and an RF rod through having a top end joined to the RF electrode or joined to a conductive member connected to the RF electrode, wherein the RF rod is a hybrid rod including a first rod member that is made of Ni and constitutes a portion of the RF rod from the top end to a predetermined position and a second rod member that is joined to the first rod member and constitutes a portion of the RF rod from the predetermined position to the base end and is made of a non-magnetic material.
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