Production method of template, template blank, and template substrate for imprinting, production method of template for imprinting, and template
Number of patents in Portfolio can not be more than 2000
United States of America
Stats
-
Dec 17, 2024
Grant Date -
Jul 28, 2022
app pub date -
Apr 18, 2022
filing date -
Apr 18, 2022
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A template and a template blank are used for imprint lithography transferring a transfer pattern in a concave and convex structure to a resin on a transfer substrate, in which a first step structure is formed on a main surface of a base, a second step structure is formed on the first step structure, and an outside region of the second step structure on an upper surface of the first step structure is covered with a light shielding film to solve the above problem.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully