Bonded body and acoustic wave element

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United States of America

PATENT NO 12166465
APP PUB NO 20220149811A1
SERIAL NO

17579678

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Abstract

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A bonded body includes a supporting substrate, piezoelectric material substrate and a multilayer film between the supporting substrate and piezoelectric material substrate. The multilayer film includes a lamination structure having a first layer, second layer, third layer and fourth layer in that order. The first layer and third layer are composed of silicon oxides, and the second layer and fourth layer are composed of metal oxides. The refractive index of the second layer is higher than the refractive index of the first layer and refractive index of the third layer. The refractive index of the second layer is different from the refractive index of the fourth layer.

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Patent OwnerAddress
NGK INSULATORS LTD2-56 SUDA-CHO MIZUHO-KU NAGOYA-SHI AICHI-PREFECTURE 467-8530

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Asai, Keiichiro Nagoya, JP 61 378
Hattori, Ryosuke Ichinomiya, JP 15 106
Tai, Tomoyoshi Inazawa, JP 57 806
Uno, Yudai Nagoya, JP 19 111

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