Piezo-actuated MEMS resonator with reduced nonlinear tcf

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United States of America

PATENT NO 12166464
APP PUB NO 20240223151A1
SERIAL NO

18402488

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Abstract

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A microelectromechanical system (MEMS) resonator includes a degenerately-doped single-crystal silicon layer and a piezoelectric material layer disposed on the degenerately-doped single-crystal silicon layer. An electrically-conductive material layer is disposed on the piezoelectric material layer opposite the degenerately-doped single-crystal silicon layer, and patterned to form first and second electrodes.

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SITIME CORPORATION5451 PATRICK HENRY DRIVE SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Doll, Joseph C Mountain View, US 23 164
Grosjean, Charles I Los Gatos, US 61 247
Hagelin, Paul M Saratoga, US 72 552
Hill, Ginel C Sunnyvale, US 28 110
Miller, Nicholas Sunnyvale, US 53 644

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