Identification of and compensation for a failure in a heater array

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12165891
APP PUB NO 20210384053A1
SERIAL NO

17285900

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Abstract

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Systems and methods for identifying a single failure in a heater array and compensating for the failure are described. The methods include identifying two X buses and two Y buses of the heater array having a location of the failure. A confirmation of the single failure within the heater array is performed after identifying the two X and two Y buses. Once the single failure is confirmed, the location of the failure is identified. The methods include compensating for the single failure by adjusting a duty cycle of a heater at the location of the failure, adjusting additional duty cycles of heaters along the same X bus as the failed heater and the same Y bus as the failed heater, and maintaining remaining duty cycles of power provided to remaining heaters of the heater array.

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Patent Owner(s)

Patent OwnerAddress
LAM RESEARCH CORPORATIONFREMONT CA

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Jing, Changyou Livermore, US 12 14

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