Cleaning unit and substrate processing apparatus including same

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12165885
APP PUB NO 20220172965A1
SERIAL NO

17531800

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A cleaning unit includes a gas spray part arranged above a substrate to be cleaned, and sprays a gas toward the substrate in order to separate a contaminant on the substrate from the substrate, and a suction part provided on a side of the gas spray part, and including an inlet suctioning and removing the contaminant that is separated from the substrate.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
SEMES CO LTDCHUNGNAM SOUTH KOREA JEOLLANAM-DO

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lim, Sok Taek Pyeongtaek-si, KR 1 1

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
3.5 Year Payment $1600.00 $800.00 $400.00 Jun 10, 2028
7.5 Year Payment $3600.00 $1800.00 $900.00 Jun 10, 2032
11.5 Year Payment $7400.00 $3700.00 $1850.00 Jun 10, 2036
Fee Large entity fee small entity fee micro entity fee
Surcharge - 3.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00