Ceramic heater

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12165855
APP PUB NO 20210384014A1
SERIAL NO

17445332

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Abstract

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A ceramic heater includes an AlN ceramic substrate having a wafer placement surface in which, from a position closer to the wafer placement surface, a plasma-generation RF electrode and a heater electrode are embedded in this order so as to be separated from each other. The AlN ceramic substrate includes an AlN ceramic high-resistivity layer disposed between the RF electrode and the heater electrode, and an AlN ceramic low-resistivity layer other than the high-resistivity layer. The high-resistivity layer and the low-resistivity layer each contain Si, Mg, and Ti. The high-resistivity layer has higher Mg and Ti contents and a higher volume resistivity than the low-resistivity layer.

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Patent Owner(s)

Patent OwnerAddress
NGK INSULATORS LTDJAPAN'S AICHI AICHI

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Takasaki, Hideaki Handa, JP 3 21

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