Uniformity control circuit for impedance match

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12165844
APP PUB NO 20230253184A1
SERIAL NO

18010194

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Abstract

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An impedance match housing is described. The impedance match housing includes an impedance matching circuit having an input that is coupled to a radio frequency (RF) generator. The impedance matching circuit has an output that is coupled to a first RF strap. The impedance match housing includes a uniformity control circuit coupled in parallel to a portion of the first RF strap to modify uniformity in a processing rate of a substrate when the substrate is processed within a plasma chamber.

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Patent Owner(s)

  • LAM RESEARCH CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Holland, John P San Jose, US 56 2720
Ji, Bing Pleasanton, US 69 3678
Kozakevich, Felix Leib Sunnyvale, US 24 83
Marakhtanov, Alexei M Albany, US 8 67

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