Metrology method and apparatus for of determining a complex-valued field

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United States of America

PATENT NO 12164233
APP PUB NO 20220299888A1
SERIAL NO

17619961

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Abstract

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Disclosed is a method of determining a complex-valued field relating to a sample measured using an imaging system. The method comprises obtaining image data relating to a series of images of the sample, imaged at an image plane of the imaging system, and for which at least two different modulation functions are imposed in a Fourier plane of the imaging system; and determining the complex-valued field from the imaging data based on the imposed modulation functions.

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ASML NETHERLANDS B V5500 AH VELDHOVEN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Coene, Willem Marie Julia Marcel Geldrop, NL 92 1036
Konijnenberg, Alexander Prasetya Eindhoven, NL 7 8
Pandey, Nitesh Eindhoven, NL 63 188

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