Optical waveguide passivation for moisture protection
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United States of America
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Dec 10, 2024
Grant Date -
Jan 13, 2022
app pub date -
Jul 12, 2021
filing date -
Jul 12, 2021
priority date (Note) -
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Abstract
In part, in one aspect, the disclosure relates to a method for passivating a waveguide of an optical circuit. The method includes etching a suspended waveguide in the optical circuit; the suspended waveguide having a top surface, a bottom surface, and side surfaces; and covering the top surface and side surfaces of the suspended waveguide with a passivation coating having a thickness that ranges from between about 10 nm to about 20 nm. In one embodiment, the method further includes removing one or more coatings from a portion of the optical circuit. The disclosure also relates to various passivated optical silicon circuit embodiments.
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