Reflective compact lens for magneto-optic Kerr effect metrology system

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12164093
APP PUB NO 20220137380A1
SERIAL NO

17505591

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Abstract

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A Cassegrain or quasi-Cassegrain structure objective lens is used in a polar MOKE metrology system. The quasi-Cassegrain reflective objective lens includes a primary concave mirror and a secondary mirror. The primary concave mirror has a wider diameter than the secondary mirror and defines an aperture through which the laser beam is configured to be transmitted toward the secondary mirror. The secondary mirror can be convex, concave, or have a flat surface.

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Patent Owner(s)

Patent OwnerAddress
KLA CORPORATIONONE TECHNOLOGY DRIVE MILPITAS CA 95035

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dong, Lansheng Shanghai, CN 3 3
Johnson, Walter H Rocklin, US 10 241
Krishnan, Shankar Santa Clara, US 194 1117
Li, Chunxia Shanghai, CN 13 8
Ni, Rui Shanghai, CN 29 110
Peng, Haijing Shanghai, CN 3 3
Shi, Jianou Palo Alto, US 28 1268
Wang, David Y Santa Clara, US 55 882
Wang, Jun Shanghai, CN 2215 18848
Yan, Changfei Shanghai, CN 2 3
You, Hai-Yang Shanghai, CN 3 3
Zheng, Alex Xuhui, CN 3 5
Zhou, Yang Shanghai, CN 354 1463

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