CVD system with substrate carrier and associated mechanisms for moving substrate therethrough

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12163228
APP PUB NO 20220372621A1
SERIAL NO

17305206

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A substrate carrier and a mechanism for moving the substrate carrier through a chemical vapor deposition system are provided. The substrate carrier includes a cylindrical housing having an interior surface. A plurality of plurality of shelves fixed to the interior surface, each shelf configured to support at least one substrate. The substrate carrier may include a connector configured to engage the substrate carrier with the mechanism. The mechanism may include a moveable arm and a motor configured to actuate the moveable arm. The moveable arm may include an actuating member connected to the motor and configured to move the moveable arm between a retracted state and an extended state. The moveable arm may be configured to operate in a chamber having a first pressure and a first temperature and the motor may be configured to operate in an environment having a second pressure.

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Patent Owner(s)

Patent OwnerAddress
RAMOT AT TEL-AVIV UNIVERSITY LTDTEL-AVIV

International Classification(s)

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  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bar-Rabi, Eran Shimshit, IL 3 10
Ben-Naim, Yosi Eilat, IL 7 18
Gridish, Yaakov Yoqneam Ilit, IL 25 49
Ismach, Ariel Rosh Haain, IL 5 44
Kaufman, Tal Shimshit, IL 3 10
Mentovich, Elad Tel Aviv, IL 202 281
Naveh, Doron Petah-Tikva, IL 14 27
Rotem, Yaniv Nesher, IL 9 20
Stern, Chen Kiryat Ono, IL 4 10

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Maintenance Fees

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3.5 Year Payment $1600.00 $800.00 $400.00 Jun 10, 2028
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