Enclosed cavity structures

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12162747
APP PUB NO 20210002128A1
SERIAL NO

17027671

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Abstract

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An example of a cavity structure comprises a cavity substrate comprising a substrate surface, a cavity extending into the cavity substrate, the cavity having a cavity bottom and cavity walls, and a cap disposed on a side of the cavity opposite the cavity bottom. The cavity substrate, the cap, and the one or more cavity walls form a cavity enclosing a volume. A component can be disposed in the cavity and can extend above the substrate surface. The component can be a piezoelectric or a MEMS device. The cap can have a tophat configuration. The cavity structure can be micro-transfer printed from a source wafer to a destination substrate.

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Patent Owner(s)

Patent OwnerAddress
X-CELEPRINT LIMITED6TH FLOOR 2 GRAND CANAL SQUARE DUBLIN D02 A342

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cok, Ronald S Rochester, US 695 25064
Gul, Raja Fazan Cork, IE 20 62
Trindade, António José Marques Cork, IE 44 419

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