Substrate conveying robot and substrate conveying robot system
Number of patents in Portfolio can not be more than 2000
United States of America
Stats
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Dec 10, 2024
Grant Date -
May 18, 2023
app pub date -
Nov 17, 2021
filing date -
Nov 17, 2021
priority date (Note) -
In Force
status (Latency Note)
Importance
Calculated Rating
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US Family Size
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Non-US Coverage
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Abstract
A substrate conveying robot includes an arm, a substrate holding hand, a sensor board to which a sensor is electrically connected, and a control board on which a controller is mounted, the control board including a universal connector connectable to different types of the sensor boards.
First Claim
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International Classification(s)
- 2021 Application Filing Year
- H01L Class
- 28775 Applications Filed
- 15216 Patents Issued To-Date
- 52.88 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- H01L Class
- 0 % this patent is cited more than
- 1 Age
Maintenance Fees
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