System with substrate carrier deterioration detection and repair

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12162134
APP PUB NO 20230191619A1
SERIAL NO

18170962

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A system includes a plurality of semiconductor processing tools; a carrier purge station; a carrier repair station; and an overhead transport (OHT) loop for transporting one or more substrate carriers among the plurality of semiconductor processing tools, the carrier purge station, and the carrier repair station. The carrier purge station is configured to receive a substrate carrier from one of the plurality of semiconductor processing tools, purge the substrate carrier with an inert gas, and determine if the substrate carrier needs repair. The carrier repair station is configured to receive a substrate carrier to be repaired and replace one or more parts in the substrate carrier.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD8 LI-HSIN RD 6 HSINCHU SCIENCE PARK HSINCHU 300-78

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Yi-Ming Taipei County, TW 133 594
Hung, Cheng-Ho Tainan, TW 6 8
Li, Fu-Hsien Taichung, TW 36 25
Lin, Chih-Wei Hsinchu, TW 359 5145
Wang, Jen-Ti Taichung, TW 20 21

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