MEMS element and vibration-driven energy harvesting device
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United States of America
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Dec 3, 2024
Grant Date -
Mar 21, 2024
app pub date -
Oct 9, 2020
filing date -
Oct 9, 2020
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
This MEMS element comprising: a base; a movable portion; and an elastic portion, and a fixing portion; and a fixed portion body to which the elastic portion is fixed, wherein the elastic portion extends in a direction intersecting a moving direction of the movable portion, includes a central portion receiving a force of the movable portion, and one end and another end fixed to the fixed portion body, and includes thin portions respectively between the central portion and the one end and between the central portion and the other end, the thin portions being thinner than the central portion, the one end, and the other end.
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