Excimer laser system with long service intervals
Number of patents in Portfolio can not be more than 2000
United States of America
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Dec 3, 2024
Grant Date -
Mar 24, 2022
app pub date -
Jan 7, 2020
filing date -
Jan 7, 2020
priority date (Note) -
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Abstract
An excimer laser system includes first and second gas cylinders connected to a laser chamber for selectively supplying the laser chamber with gases that are needed to generate and emit laser pulsations having a certain energy level from the laser chamber. At least one of the first and second gas cylinders includes a halogen gas. The halogen gas is consumed during the operation of the excimer laser system. A computer system, included within the excimer laser system, is used to determine whether to resupply the laser chamber with halogen gas from the first and/or second cylinders, or to entirely flush out the gas contents of the laser chamber, and to resupply the flushed gas chamber with gas sourced from the first and/or second cylinders.
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