Semiconductor film

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12159907
APP PUB NO 20220157946A1
SERIAL NO

17588708

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Abstract

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Provided is a α-Ga2O3 based semiconductor film which is a semiconductor film in a circular shape having a crystal having a corundum-type crystal structure composed of α-Ga2O3 or an α-Ga2O3 solid solution as a main phase. The maximum value θmax and the minimum value θmin for off-angles at the center point X and four outer circumferential points A, B, C, and D of a surface of the semiconductor film satisfy the relationship of θmax-θmin≤0.30°. The off-angle is defined as an inclination angle θ of a crystal axis oriented in the substantially normal direction of the semiconductor film with respect to the film surface normal of the semiconductor film.

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Patent Owner(s)

Patent OwnerAddress
NGK INSULATORS LTDNAGOYA-SHI AICHI 467-8530

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fukui, Hiroshi Obu, JP 177 2012
Watanabe, Morimichi Nagoya, JP 66 600
Yoshikawa, Jun Nagoya, JP 136 4192

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