Die system and method of comparing alignment vectors
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United States of America
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Dec 3, 2024
Grant Date -
Dec 8, 2022
app pub date -
Sep 14, 2020
filing date -
Sep 14, 2020
priority date (Note) -
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status (Latency Note)
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Abstract
Embodiments of the present disclosure include a die system and a method of comparing alignment vectors. The die system includes a plurality of dies arranged in a desired pattern. An alignment vector, such as a die vector, can be determined from edge features of the die. The alignment vectors can be compared to other dies or die patterns in the same system. A method of comparing dies and die patterns includes comparing die vectors and/or pattern vectors. The comparison between alignment vectors allows for fixing the die patterns for the next round of processing. The methods provided allow accurate comparisons between as-deposited edge features, such that accurate stitching of dies can be achieved.
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