Illumination and detection apparatus for a metrology apparatus
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United States of America
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Dec 3, 2024
Grant Date -
Sep 1, 2022
app pub date -
Jul 14, 2020
filing date -
Jul 14, 2020
priority date (Note) -
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Abstract
An illumination and detection apparatus for a metrology tool, and associated method. The apparatus includes an illumination arrangement operable to produce measurement illumination having a plurality of discrete wavelength bands and having a spectrum having no more than a single peak within each wavelength band. The detection arrangement includes a detection beamsplitter to split scattered radiation into a plurality of channels, each channel corresponding to a different one of the wavelength bands; and at least one detector for separate detection of each channel.
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