Systems and methods for spot beam and line beam crystallization

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12157185
APP PUB NO 20200238441A1
SERIAL NO

16755419

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Abstract

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Methods and systems for crystallizing a thin film provide an optics system configured to produce a laser spot beam directed towards the thin film and truncate the laser spot beam before the laser spot beam comes into contact with the thin film. The truncated laser spot beam is continually translated in a first direction while irradiating an amorphous silicon area of the thin film to generate a molten zone in the irradiated amorphous silicon area, where the thin film cools and solidifies to form crystal grains.

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Patent Owner(s)

Patent OwnerAddress
THE TRUSTEES OF COLUMBIA UNIVERSITY IN THE CITY OF NEW YORK535 WEST 116TH STREET 412 LOW MEMORIAL LIBRARY NEW YORK NY 10027

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Choi, Insung Busan, KR 10 18
Im, James S New York, US 82 2465
Pan, Wenkai New York, US 3 7
Song, Ruobing New York, US 1 0
Wong, Vernon Mountain View, US 22 1324

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