Piezoelectric device having plurality of vibrating regions and electronic apparatus
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United States of America
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Nov 26, 2024
Grant Date -
May 28, 2020
app pub date -
Nov 21, 2019
filing date -
Nov 21, 2019
priority date (Note) -
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Abstract
A piezoelectric device includes a substrate having opening portions, a vibrating plate provided to overlap with the substrate and having a plurality of vibrating regions overlapping with the opening portions in a plan view as seen from a thickness direction of the substrate, piezoelectric elements provided in the vibrating regions, and bypass wires provided outside of the vibrating regions of the vibrating plate and electrically coupled to the plurality of piezoelectric elements, wherein slits penetrating the bypass wires in the thickness direction are provided in the bypass wires.
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