Inductively coupled plasma light source with switched power supply

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12156322
APP PUB NO 20240196506A1
SERIAL NO

18077443

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Abstract

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A method and apparatus for generating light includes a chamber having a high voltage region, a low voltage region, and a plasma generation region that defines a plasma confinement region. A magnetic core is positioned around the chamber and is configured to generate a plasma in the plasma confinement region. A switched power supply includes a DC power supply and a switched resonant charging circuit that together generate a plurality of voltage pulses at the output causing a plurality of current pulses to be applied to the power delivery section around the magnetic core so that at least one plasma loop is established around the magnetic core that confines plasma in the plasma confinement region, thereby forming a magnetically confined Z-pinch plasma. Light generated by the Z-pinch plasma propagates out of a port in the light source.

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Patent Owner(s)

Patent OwnerAddress
HAMAMATSU PHOTONICS K K1126-1 ICHINO-CHO HIGASHI-KU HAMAMATSU-SHI SHIZUOKA 435-8558
ENERGETIQ TECHNOLOGY INC205 LOWELL STREET WILMINGTON MA 01887

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Arcaro, Daniel J Medford, US 3 0
Besen, Matthew M Andover, US 29 1169
Horne, Stephen F Medford, US 23 335
Niell,, III Frederick Marvin Tampa, US 6 2
Reisman, David B Wakefield, US 3 0
Roderick, Michael J Everett, US 7 5
Smith, Donald K Newton, US 68 2674

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