Resonator and resonance device for vibrating in a contour vibration mode
Number of patents in Portfolio can not be more than 2000
United States of America
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Nov 26, 2024
Grant Date -
Jan 6, 2022
app pub date -
Sep 17, 2021
filing date -
Sep 17, 2021
priority date (Note) -
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Abstract
A resonator is provided that includes a vibration member that includes a substrate, a metal layer formed along one of main surfaces of the substrate, and a piezoelectric thin film disposed between the substrate and the metal layer. The vibration member vibrates such that a main vibration is a contour vibration. Moreover, a frame surrounds at least a portion of the vibration member, and a support unit connects the vibration member to the frame. The vibration member includes depressed portions on or above the one of main surfaces where the piezoelectric thin film is removed.
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