Line narrowing gas laser device and electronic device manufacturing method
Number of patents in Portfolio can not be more than 2000
United States of America
Stats
-
Nov 26, 2024
Grant Date -
Jun 15, 2023
app pub date -
Feb 2, 2023
filing date -
Feb 2, 2023
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A line narrowing gas laser device includes a line narrowing device, an output coupling mirror, a laser chamber arranged on an optical path of an optical resonator, a first holder which supports the output coupling mirror, a second holder which supports the first holder to be rotatable about a rotation axis of the first holder, and an adjustment device supported by the second holder and being in contact with the first holder to rotate the first holder about the rotation axis. The line narrowing device has a characteristic of changing, into a first direction, beam pointing of laser light output toward the output coupling mirror when temperature inside the line narrowing device rises. The second holder and the adjustment device rotate the first holder in a direction in which a change in the first direction in the beam pointing of the laser light is suppressed by thermal expansion.
First Claim
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International Classification(s)
- 2023 Application Filing Year
- H01S Class
- 826 Applications Filed
- 167 Patents Issued To-Date
- 20.22 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- H01S Class
- 0 % this patent is cited more than
- 1 Age
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