Long-life extended temperature range embedded diode design for electrostatic chuck with multiplexed heaters array

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12154814
APP PUB NO 20240136214A1
SERIAL NO

18405595

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A substrate support for a plasma chamber includes a base plate arranged along a plane, a first layer of an electrically insulating material arranged on the base plate along the plane, a plurality of heating elements arranged in the first layer along the plane, and a plurality of diodes arranged in respective cavities in the first layer. The plurality of diodes are connected in series to the plurality of heating elements, respectively. Each of the plurality of diodes includes a die of a semiconductor material arranged in a respective one of the cavities. The semiconductor material has a first coefficient of thermal expansion. A first side of the die is arranged on the first layer along the plane. A first terminal of the die is connected to a first electrical contact on the first layer.

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Patent Owner(s)

Patent OwnerAddress
LAM RESEARCH CORPORATIONFREMONT CA

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Tian, Siyuan Newark, US 22 49

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