Susceptor for high-temperature use having shaft with low thermal conductivity

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United States of America

PATENT NO 12154799
APP PUB NO 20230088822A1
SERIAL NO

17902420

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Abstract

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Disclosed is a susceptor for high-temperature use having a shaft with low thermal conductivity, wherein in a susceptor including a plate for wafer mounting and a shaft coupled to the plate, the plate and the shaft each include a sintered body having 90 wt % or more of an AlN phase, the sintered body of the plate is a magnesium-containing AlN sintered body having a volume resistance of 5*108 Ω·cm or more at 650° C., and the sintered body of the shaft is an AlN sintered body having a room-temperature thermal conductivity of 100 W/mK or less.

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Patent Owner(s)

Patent OwnerAddress
MICO CERAMICS LTD100 GONGDAN-RO ANSEONG-SI GYEONGGI-DO 17567

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Jin, Jung Chul Gyeonggi-do, KR 3 1

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