Gas analyzer apparatus and method for controlling gas analyzer apparatus
Number of patents in Portfolio can not be more than 2000
United States of America
Stats
-
Nov 26, 2024
Grant Date -
Jul 14, 2022
app pub date -
Mar 30, 2022
filing date -
Mar 30, 2022
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
There is provided a gas analyzer apparatus that analyzes inflowing sample gas. The gas analyzer apparatus includes a filter unit that filters the sample gas, a detector unit that detects the result of filtering, a housing that houses these elements, and a control unit that controls the respective potentials of these elements. The control unit includes a cleaning control unit that sets the respective potentials of the filter unit, the detector unit, and the housing to cleaning potentials that draws in, as plasma for cleaning purposes, process plasma from a source that supplies the sample gas or plasma generated by a plasma generation unit.
First Claim
Family
International Classification(s)
- [Classification Symbol]
- [Patents Count]
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully