Passivation of nonlinear optical crystals
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United States of America
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Nov 26, 2024
Grant Date -
N/A
app pub date -
Nov 22, 2021
filing date -
Nov 22, 2021
priority date (Note) -
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status (Latency Note)
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Abstract
The passivation of a nonlinear optical crystal for use in an inspection tool includes growing a nonlinear optical crystal in the presence of at least one of fluorine, a fluoride ion and a fluoride-containing compound, mechanically preparing the nonlinear optical crystal, performing an annealing process on the nonlinear optical crystal and exposing the nonlinear optical crystal to a hydrogen-containing or deuterium-containing passivating gas.
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International Classification(s)
- 2021 Application Filing Year
- G01N Class
- 11893 Applications Filed
- 4411 Patents Issued To-Date
- 37.09 % Issued To-Date
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- G01N Class
- 0 % this patent is cited more than
- 1 Age
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