Comb-drive device used in micro electro mechanical system

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12151933
APP PUB NO 20220298004A1
SERIAL NO

17202366

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A comb-drive device used in Micro Electro Mechanical System is provided, and the comb-drive device includes: a rotor comprising a rotor body and a plurality of rotor combs provided on the rotor body; and a stator comprising one or more stator bodies and a plurality of stator combs provided on the one or more stator bodies. The rotor is spaced from the stator by a distance, the rotor and the stator are arranged along a direction in which the rotor is movable, and the plurality of rotor combs and the plurality of stator combs are alternately arranged in a direction particular to the direction in which the rotor is movable; and the rotor body is made of an insulating material, and each of the plurality of rotor combs is made of a conductive material or coated with a conductive material. The present invention can increase sensitivity and capacitance efficiency of the comb-drive device.

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Patent Owner(s)

Patent OwnerAddress
AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO LTDA-BLOCK NANJING UNIVERSITY RESEARCH CENTER SHENZHEN BRANCH NO 6 YUEXING 3RD ROAD SOUTH HI-TECH INDUSTRIAL PARK NANSHAN DISTRICT SHENZHEN GUANGDONG 518057 518057

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cargill, Scott Lyall Edinburgh, GB 26 122

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