Microelectromechanical systems device having a mechanically robust anti-stiction/outgassing structure

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United States of America

PATENT NO 12151932
APP PUB NO 20230382712A1
SERIAL NO

18364702

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Abstract

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Various embodiments of the present disclosure are directed towards a microelectromechanical system (MEMS) device. The MEMS device includes a dielectric structure disposed over a first semiconductor substrate, where the dielectric structure at least partially defines a cavity. A second semiconductor substrate is disposed over the dielectric structure. The second semiconductor substrate includes a movable mass, where opposite sidewalls of the movable mass are disposed between opposite sidewall of the cavity. An anti-stiction structure is disposed between the movable mass and the dielectric structure, where the anti-stiction structure is a first silicon-based semiconductor.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTDHSIN-CHU

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chang, Kuei-Sung Kaohsiung, TW 97 622
Cheng, Chun-Wen Zhubei, TW 259 3778
Hsieh, Yuan-Chih Hsinchu, TW 102 1115
Lai, Fei-Lung New Taipei, TW 44 560
Pan, Shing-Chyang Jhudong Township, TW 66 396
Wang, Yi-Ren New Taipei, TW 18 11

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