Methods for inserting a fastener into a wafer carrier

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12151324
APP PUB NO 20230302589A1
SERIAL NO

18199633

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Importance

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Abstract

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The present disclosure relates to methods for inserting a fastener into a wafer-carrying pod. The system includes a robotic arm with a screw tool assembly disposed at the far end of the robotic arm. The screw tool assembly includes a lower sleeve configured to receive a fastener. A screwdriver is disposed within an upper sleeve of the screw tool assembly, and a motor is provided to rotate the screwdriver. In use, the screw tool assembly is positioned over the fastener so the lower sleeve surrounds the fastener and the screwdriver engages the fastener. The fastener head is received within the lower sleeve, and the screwdriver screws the fastener into the pod.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANYNO 8 LI-HSIN RD 6 SCIENCE-BASED INDUSTRIAL PARK HSIN-CHU 300-77

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Yu-Chen Hemei Township, TW 60 385
Chu, Yang-Ann Hsinchu, TW 72 260
Huang, Chih-Hung Hsinchu, TW 119 432
Pai, Jiun-Rong Jhubei, TW 139 890
Wu, Cheng-Lung Zhunan Township, TW 66 53

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