Thermal diffuser for a semiconductor wafer holder

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12148650
APP PUB NO 20230139249A1
SERIAL NO

17983643

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Abstract

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A heating assembly includes a support member for supporting a target thereon, a diffuser layer attached to the support member, and a heater attached to the diffuser layer. The diffuser layer includes discrete diffuser segments separated by gaps. The discrete diffuser segments are made of the same material and are configured to allow a desired thermal gradient to be maintained between the discrete diffuser segments during heating of the target.

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Patent Owner(s)

Patent OwnerAddress
WATLOW ELECTRIC MANUFACTURING COMPANY12001 LACKLAND ROAD ST LOUIS MO 63146

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Parkinson, Blake St. Louis, US 4 68
Ptasienski, Kevin O'Fallon, US 61 544
Wallinger, Martin Abtenau, AT 22 53
Zhang, Sanhong Ballwin, US 36 107

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