Ceramic heater

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12144067
APP PUB NO 20210243850A1
SERIAL NO

17301992

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A ceramic heater includes a ceramic plate, a main resistance heating element, and sub resistance heating elements. The main resistance heating element is a heating element that is disposed on a first plane parallel with a wafer placement surface in the ceramic plate and that has a coil shape. The sub resistance heating elements are heating elements that are disposed on a second plane parallel with the first plane in the ceramic plate between the first plane and the wafer placement surface, that complement heating with the main resistance heating element, and that have a two-dimensional shape.

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Patent Owner(s)

Patent OwnerAddress
NGK INSULATORS LTDJAPAN'S AICHI AICHI

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ishikawa, Masaki Handa, JP 80 676
Motoyama, Shuichiro Nagoya, JP 12 24

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