Warpage control in the packaging of integrated circuits

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12144065
APP PUB NO 20220361293A1
SERIAL NO

17869384

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Importance

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Abstract

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A method includes placing a first package component over a vacuum boat, wherein the vacuum boat comprises a hole, and wherein the first package component covers the hole. A second package component is placed over the first package component, wherein solder regions are disposed between the first and the second package components. The hole is vacuumed, wherein the first package component is pressed by a pressure against the vacuum boat, and wherein the pressure is generated by a vacuum in the hole. When the vacuum in the hole is maintained, the solder regions are reflowed to bond the second package component to the first package component.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTDNO 8 LI-HSIN ROAD 6 HSIN-CHU 300-77

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Cheng-Ting Taichung, TW 51 444
Chen, Wei-Yu Taipei, TW 709 6443
Cheng, Ming-Da Taoyuan, TW 447 4774
Lee, Chien-Wei Xiushui Township, TW 60 87
Lin, Hsiu-Jen Zhubei, TW 172 1408
Liu, Chung-Shi Hsinchu, TW 824 11367

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