Substrate for a temperature-compensated surface acoustic wave device or volume acoustic wave device

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12143093
APP PUB NO 20230378931A1
SERIAL NO

18352972

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Abstract

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A substrate for a surface acoustic wave device or bulk acoustic wave device, comprising a support substrate and an piezoelectric layer on the support substrate, wherein the support substrate comprises a semiconductor layer on a stiffening substrate having a coefficient of thermal expansion that is closer to the coefficient of thermal expansion of the material of the piezoelectric layer than that of silicon, the semiconductor layer being arranged between the piezoelectric layer and the stiffening substrate.

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Patent Owner(s)

Patent OwnerAddress
SOITECPARC TECHNOLOGIQUE DES FONTAINES CHEMIN DES FRANQUES BERNIN 38190

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Barge, Thierry Chevrieres, FR 30 368
Broekaart, Marcel Theys, FR 47 259
Desbonnets, Eric Lumbin, FR 25 54
Guenard, Pascal Froges, FR 23 151
Kononchuk, Oleg Bernin, FR 89 317
Radu, Ionut Crolles, FR 60 1316

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