Thermally-controlled photonic structure
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United States of America
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Nov 12, 2024
Grant Date -
Mar 9, 2023
app pub date -
Nov 14, 2022
filing date -
Nov 14, 2022
priority date (Note) -
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status (Latency Note)
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Abstract
In some implementations, a thermally-controlled photonic structure may include a suspended region that is suspended over a substrate; a plurality of bridge elements connected to the suspended region and configured to suspend the suspended region over the substrate, where a plurality of openings are defined between the plurality of bridge elements; and at least one heater element having a modulated width disposed on the suspended region. The at least one heater element having the modulated width may include at least one section of a greater width and at least one section of a lesser width. The at least one section of the greater width may be in alignment with an opening of the plurality of openings and the at least one section of the lesser width may be in alignment with a bridge element of the plurality of bridge elements.
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