Clamp ring and method of using clamp ring

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12142514
APP PUB NO 20230068139A1
SERIAL NO

17459827

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Importance

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Abstract

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A clamp ring including an inner periphery of increased diameter at locations where inwardly extending tabs are not located reduces the risk a workpiece that is placed in close proximity to the clamp ring or which contacts the clamp ring during processing will stick to the clamp ring.

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First Claim

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD8 LI-HSIN RD 6 HSINCHU SCIENCE PARK HSINCHU 300-78

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chi, Yuan-Hsin Hsinchu, TW 25 3
Chou, Chih-Wei Hsinchu, TW 21 21
Chou, Yin-Tun Hsinchu, TW 20 4
Liu, Yu-Chi Hsinchu, TW 16 2
Wang, Chih-Ming Hsinchu, TW 123 844
Wang, Hung-Chih Hsinchu, TW 40 148

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